½ºÇÉÄÚÅÍ(Spincoater) ¸¶½ºÅ©¾ó¶óÀ̳Ê(Mask
Aligner) ÆÄ¸±·»ÄÚÅÍ(Pparylene
Coater)
Spin coater JSI-402D,603D½Ã¸®Áî |
||
±âÁ¾ |
¸Å´º¾ó ½ºÇÉÄÚÅÍ |
¸Å´º¾ó ½ºÇÉÄÚÅÍ |
ǰ ¸í |
JSI-402D |
JSI-603D |
½Ã·á »çÀÌÁî |
¥õ10¡100 mm dia ÀÌÇÏ |
10¡150 mm dia ÀÌÇÏ |
|
(100 gÀÌÇÏ) |
(100 gÀÌÇÏ) |
ÄÅ Áö¸§ ÀçÁú |
¥õ200 mm¡¤½ºÅÙ·¹½º |
¥õ300 mm¡¤½ºÅÙ·¹½º |
º»Ã¼ ÀçÁú¡¤Ä¡¼ö |
SS |
SS |
|
250W*250D*260Hmm |
280W*280D*270Hmm |
½ºÇÉ ¸ðÅÍ |
AC¼º¸¸ðÅÍ |
same |
ȸÀü¼ö |
100¡6000rpm |
same |
|
|
|
ȸÀü Ç¥½Ã |
µðÁöÅ» Ç¥½Ã |
same |
ȸÀüstep |
5´Ü(µðÁöÅ»), 5 Recipe |
10´Ü(µðÁöÅ»),10 Recipe |
|
1 sec¡999sec |
1 sec¡999sec |
Àü¿ø |
AC220V |
same |
CDA or N2 |
Option |
Option |
Áø°ø |
200 Torr ÀÌ»ó |
same |
ÅäÃâ ³ëÁñ |
Option |
Option |
¿É¼Ç |
ô±âº» 1°³ |
ô±âº» 1°³ |
º£Å¨ ÆßÇÁ |
Option |
Option
|
|
¾ÈÀü Ä¿¹ö |
¾ÈÀü Ä¿¹ö |
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½ºÇÉÄÚÅÍ/Spincoater ½ºÇÉÄÚÅÍ/Spincoater
½ºÇÉÄÚÅÍ/Spincoater ½ºÇÉÄÚÅÍ/Spincoater
½ºÇÉÄÚÅÍ/Spincoater ½ºÇÉÄÚÅÍ/Spincoater
½ºÇÉÄÚÅÍ/Spincoater