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Spin rinse dryers
Model JS2D is designed to dry two or four carriers simultaneously.
With a clean filter installed in the upper part, clean air is constantly introduced
to the inside of
the machine to keep the chamber clean. (Optional D.I rinsing available) |
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2, 4?cassettes type
Model |
JS2D-150(6inch), JS2D-200(8inch), JS2D-300(12inch)-2 carrier type |
2~4 carrier type |
2, 4-carrier type available: 2, 4, 5, 6 inch wafer
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Rotating speed |
Spin : 0-900rpm(variable)
Dry : 0-900rpm(variable)
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Processing time |
Spin: 0-999.9sec(variable)
Dry: 0-999.9sec(variable) |
Rinse |
D.I water rinse ( optional) |
Auto Balancing |
optional |
HEPA, ULPA filter |
0.3¥ìm, filtration 99.99% or over. |
Lid |
Automatically opened/closed |
Exhaust |
Auto damper provided |
Power supply |
3¥õ AC220V, 50/60Hz¡¡3¥õ 380V AC, 50/60Hz |
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